Towards Ultrafast Laser Micromachining of X-Ray Gratings and Creation of Sub-Micron Hole Patterns, Comparison of Results With Bessel and Gaussian Beams
We compare micromachining results with Gaussian and Bessel beams using an UV picosecond laser system and demonstrate feasibility to produce tungsten gratings for x-ray interferometry medical imaging, and sub-micrometer size hole patterns.The advantages of Bessel beams compared to Gaussian beams, are demonstrated for micromachining of rectangular sh